CUI Yuqing, LI Jing, XI Sha, WANG Na, WU Zhou, ZHU Qi, AN Geng
(Jinduicheng Molybdenum Co., Ltd., Xi’an 710077, Shaanxi, China)

Abstract:  Hot pressing technology was used to prepare molybdenum disulfide target with high density. The effects of sintering temperature, pressure, time, sintering atmosphere and raw materials were studied. Relative density, composition and microstructure of the target were characterized by using Archimedes method, XRD, SEM and EDS. Temperature, pressure and time were the main factors affecting the relative density of the target. It was showed that molybdenum disulfide target with a relative density of 98.5% could be obtained at 1100 ℃ at 36 MPa in 1.5 h in vacuum, with molybdenum disulfide powder, which meets the requirements as sputtering target. In order to further increase the density, Ar was introduced into the system at atmospheric pressure. As the hot pressing temperature was raised to 1150 ℃, the relative density could reach 99.1% and 99.8%, with powder and blank, respectively. Finally, fracture surfaces of the samples with different densities were characterized by using SEM.

Key words:  molybdenum disulfide; target; hot pressing sintering; densification