ZHANG Wangxi 

(1. School of Materials & Chemical Engineering, Zhongyuan University of Technology, Zhengzhou 451191, Henan, China; 2. Henan Research Center on Diamond Carbon Engineering Technology, Zhengzhou 451191, Henan China; 3. Henan Research Center on Diamond and Carbon Engineering Technology, Zhengzhou 451191, Henan, China)

Abstract:  In order to further understand the synthesis of diamond with chemical vapour deposition (CVD), synthesis process, structural and morphologic development and applications were summarized in this article. There are various chemical vapour deposition approaches, including microwave plasma chemical vapour deposition, hot filament chemical vapour deposition, direct current arc plasma jet chemical vapour deposition and so on. The resultant diamonds include crystalline diamond, micro/nano-crystalline diamond coatings and diamond-like films. The diamonds synthesized with chemical vapour deposition have mainly been used as cultivating diamonds, tool coating, semiconductor device materials, electrode material for water treatment and other functional materials. Due to the superiority in quality, size, clarity and function of diamond synthesis by chemical vapor deposition, chemical vapour deposition process is expected to the high pressure and high temperature methods to produce diamonds with similar or higher performances in the coming decades. In this regard, it is necessary to increase the production rate, enhance the product quality, enlarge the size and enrich the functions, so as to accelerate the development of chemical vapor deposition for the synthesis of diamonds.

Key words:  chemical vapour deposition; diamond; super-hard materials; microwave plasma