ZHANG Ergeng, ZHANG Zhifu, ZHOU Qiong, HUANG Biao, CHEN Qiang, SHI Shuyang, HAN Ming
(1.Shanghai Engineering Research Center of Physical Vapor Deposition (PVD) Superhard Coating and Equipment, Shanghai Institute of Technology, Shanghai 201418, China; 2. Shanghai Zi Ri Packaging Co., Ltd, Shanghai 201108, China)

Abstract: Diamond-like carbon films with different proportions of titanium dopant were prepared by magnetron sputtering. The effect of titanium doping on their properties was studied. The microstructure, thickness, sp2-C and sp3-C ratio, bonding strength and internal stress of the diamond-like carbon films were researched by the experiments. Results show that the properties of the DLC films can be improved by doping titanium dopant. The titanium dopant enhances the film-base bonding degree and decreases the internal stress. When the proportion of the titanium dopant reaches 8.5%, the bonding between the film and the substrate is excellent, and the internal stress, which is 4.5 GPa without titanium dopant, is reduced to 2.1 GPa. It can be obtained from this study that the doping of titanium element can improve the performance of the diamond-like carbon film. When the proportion of titanium dopant is 8.5%, the performance of the DLC film is excellent.

Key words：diamond-like carbon film; magnetron sputtering ion plating; bonding force; internal stress; titanium doping