WEI Qihong ¹, ZHAO Zhenhua ², FU Xinghua ¹, HOU Wenping ¹

(1.Department of Materials Science and Engineering, J inan Univers ity, J inan 250022; 2.The Exploitation Service Center of Materials of City Cons truction, J inan 250032)

Abstract: Barium strontium titanate films with higher properties have been obtained by sol - gel processing on Pt/TiO₂/SiO₂/Si subs trate using barium acetate, strontium acetate and titanium- tetrabutoxide as starting materials . X- rays diffraction revealed that at 750℃ the BST films had crys tallized into ABO₃  perovskite phase. Analys is indicated that large，uniform grains , and the best dielectric properties were obtained at 750℃. Analys is by TEM revealed that grains were crys tallized better,close to each other, and micro- domains were detected at 750℃.

Keywords: BST, annealing, X- ray diffraction, dielectric constant- frequency