FAN Liqin

(Xiamen Institute of Technology, Huaqiao University, Xiamen 341027, Fujian, China)

Abstract: Transparent conducting Al-doped zinc oxide (AZO) films were deposited on BK-7 glass substrates by radio frequency magnetron sputtering. The effect of thickness on electrical and optical properties of AZO films was studied. Results indicated that the figure of merit decreased as the average transmittance in visible spectral region for all samples slowly increased and the resistivity of the film sharply decreased when the thickness of AZO films increased. The highest figure of merit of 25.52×10^-4 Ω^-1, with the lowest sheet resistance of 82 Ω/sq and the average transmittance of 85.52% was obtained when the thickness of AZO films was 395 nm. As-prepared AZO films with good transparent conductive properties can be widely used in various fields such as solar cells and flat panel displays.

Key words: aluminum-doped zinc oxide film; thickness; electrical properties; optical properties