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Study of Electricl Property Modification of Ion Implanted Ceramics Surface

LI Shipu1, WANG Guomei1, XIN Ning1, REN Wei1, FAN Donghui2

(1.Wuhan University of Technology; 2.Jingdezhen Ceramic Institute）

Abstract： Combinings ISS theory, the film structure of ion implanted cermic is studied by means of Rutherford Back Scattering, Auger Electron Spectorscopy and X ran Photoelectron spectroscopy. The film resistivity of the specimenis determined simultaneously using Van Der Rallw method. Finally the film-conductive mechanism of ceramic surface has been discussed.

Keywords:  Ion implanted method, Electical property modification mechanish.


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