TANG Huidong 1, SUN Yuanyuan 1, LI Longzhu 1, TAN Shouhong 2
(1.Department of Materials Engineering Technology, Changzhou Institute of Engineering Technology, Changzhou, Jiangsu 213164, China; 2. Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China)
Abstract: Amorphous Si-C-O-N coatings were deposited by RF magnetron sputtering on SSiC ceramic substrates. The reflectance of polished coatings and SSiC in various wave ranges was measured. The results show that the reflectance of coatings is lower than that of SSiC in soft X-ray. The reflectance of coatings is equal to that of SSiC in EUV. The reflectance of coatings is higher than that of SSiC in UV-VIS-NIR. This is attributed to the contribution of both surface roughness and oxygen in coating to the reflectance.
Key words： Si-C-O-N coating; soft X-ray; EUV; UV-VIS-NIR; reflectance