SHANG Fuliang 1, ZHANG Zhongjian 2 , YANG Haitao 1
(1. Shenzhen Key Laboratory of Special Functional Materials and College of Materials Science & Engineering, Shenzhen University, Shenzhen Guangdong 518060,China; 2. Zhuzhou Cemented Carbide Group Co., Ltd.,
Zhuzhou Hunan 412000,China)
Abstract:The WO3 ceramic targets with high purity and high density were prepared by pressureless sintering. The effects of powder size, molding pressure, sintering temperature and soaking time on the density of the target were studied. The results show WO3 ceramic target with high purity and high density can be prepared as the powder size is 0.27μm, the molding pressure is 60Mpa, the sintering temperature is 1200℃ and the soaking time is 1h. The WO3 target has a single monoclinic phase.
Key words:target; WO3; pressureless sintering; densification