TuYue 1, Li Qiang 1, Jiang Danyu 2
(1. Department of Chemistry, East China Normal University, Shanghai 200062; 2. Shanghai Institute of Ceramics, Chinese
Academy of Sciences, Shanghai 200050)
Abstract: Hydrogen sensitive materials of WO3 with promising sensing function are extensively applied to hydrogen sensors. This paper introduced the operating principle of WO3 hydrogen sensor and the research progress in this domain. It reviewed varied preparation methods of WO3 gas-sensitive thin film, such as sol-gel, electrodeposition, evaporation, and sputtering.Finally, the development prospect and the direction of hydrogen sensors are discussed.
Key words: WO3 ; hydrogen sensor; sol-gel; electrodeposition; evaporation; sputtering